Instrument Design
- Age of instrument
- Beam sizes
- Common problems
- Cryopumps
- Detectors
- Drawings
- Geometries
- Instrument accessories
- Instrument operation
- Instrument tests
- Ion pumps
- Known problems
- Makers
- Model name and number
- Obsolete instruments
- Photos
- Schematics
- Sensitivity
- Serial number
- Specifications
- Turbopumps
- User manuals
- Vacuum – UHV
- X-ray flux
Schematic View of Modern XPS Instruments
